Temperature characteristics of SAW resonators on Sc0.26Al0.74N/polycrystalline diamond heterostructures
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2018-04-09 |
| Journal | Smart Materials and Structures |
| Authors | Miguel SinusĆa Lozano, Zhuohui Chen, Oliver A. Williams, G.F. Iriarte |
| Institutions | Huawei Technologies (Canada), Cardiff University |
| Citations | 17 |
Abstract
Section titled āAbstractāSurface acoustic wave (SAW) resonators have been fabricated on a 2 Ī¼m scandium aluminium nitride (ScAlN) film deposited by means of pulsed-DC reactive magnetron sputtering on a 5.8 Ī¼m polycrystalline diamond substrate. Thin film characterization comprised of the assessment of the thin film texture by means of x-ray diffraction (XRD) measurements, reporting highly c-axis oriented ScAlN thin films with a full width at half maximum (FWHM) of the Ļ-Īø scans below 2Ā°. Compositional and piezoelectric analyses of the thin films synthesized with the sputtering parameters used in this work, namely a sputtering power of 700 W and a synthesis pressure of 0.53 Pa, have reported a thin film composition of Sc0.26Al0.74N together with a piezoelectric d33 constant of ā11 pC/N. Finally, a SAW resonator has been characterized using a vector network analyser (VNA) under various substrate temperature conditions with two iterations. The resulting temperature coefficient of frequency (TCF) values show a highly linear behaviour within two temperature ranges, namely from 20 K to room temperature (300 K) (ā12.5 ppm/K) as well as from 300 K up to 450 K (ā34.6 ppm/K).