Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2018-06-01 |
| Journal | Materials Science-Poland |
| Authors | BartÅomiej Dec, Mateusz Ficek, MichaÅ Rycewicz, Åukasz Macewicz, Marcin Gnyba |
| Institutions | Polish Academy of Sciences, Institute of Fluid Flow-Machinery |
| Citations | 11 |
Abstract
Section titled āAbstractāAbstract The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C] ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH 4 -H 2 mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp 3 diamond phase and sp 2 carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp 3 /sp 2 ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at Ī»= 550 nm) was achieved for BDD films deposited at 700 Ā°C. The values of extinction coefficient were below 1.4 at Ī»= 550 nm, indicating low absorption of the film