Research on the hydrogen terminated single crystal diamond MOSFET with MoO3 dielectric and gold gate metal
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2018-07-01 |
| Journal | Journal of Semiconductors |
| Authors | Zeyang Ren, Jinfeng Zhang, Jincheng Zhang, Chunfu Zhang, Pengzhi Yang |
| Institutions | Xidian University |
| Citations | 5 |
Abstract
Section titled âAbstractâThe single crystal diamond with maximum width about 10 mm has been grown by using microwave plasma chemical vapor deposition equipment. The quality of the grown diamond was characterized using an X-ray diffractometer. The FWHM of the (004) rocking curve is 37.91 arcsec, which is comparable to the result of the electronic grade single crystal diamond commercially obtained from Element Six Ltd. The hydrogen terminated diamond field effect transistors with Au/MoO 3 gates were fabricated based on our CVD diamond and the characteristics of the device were compared with the prototype Al/MoO 3 gate. The device with the Au/MoO 3 gate shows lower on-resistance and higher gate leakage current. The detailed analysis indicates the presence of aluminum oxide at the Al/MoO 3 interface, which has been directly demonstrated by characterizing the interface between Al and MoO 3 by X-ray photoelectron spectroscopy. In addition, there should be a surface transfer doping effect of the MoO 3 layer on H-diamond even with the atmospheric-adsorbate induced 2DHG preserved after MoO 3 deposition.