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Silicon Carbide Micromechanical and Autoemission Structure-Based RF Switches for Harsh Environments

MetadataDetails
Publication Date2018-08-01
AuthorsAnton V. Lagosh, Vladimir A. Golubkov, Vladimir A. Ilyin, Andrey V. Korlyakov, Š’. Š’. Š›ŃƒŃ‡ŠøŠ½ŠøŠ½
InstitutionsSaint Petersburg State Electrotechnical University
Citations1

Silicon carbide is one of the most promising materials for RF devices operating in harsh environment conditions. This paper represents main features of RF switches designed and produced at St. Petersburg Electrotechnical University. Two types of RF switches are observed: MEMS switches with a movable element based on the silicon carbide film with controlled bending and matrices of highly stable autoemission structures based on the composition ā€œsilicon carbide - nanocrystalline diamondā€. The presented component base allows to cover the frequency range from GHz to THz.