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Study of the Structural and Morphological Properties of HPHT Diamond Substrates

MetadataDetails
Publication Date2018-10-18
JournalSemiconductors
AuthorsP. A. Yunin, П. Š’. Волков, Yu. N. Drozdov, A. V. Koliadin, Š”. А. ŠšŠ¾Ń€Š¾Š»ŠµŠ²
InstitutionsInstitute for Physics of Microstructures, Institute of Applied Physics
Citations8

The morphological and structural properties of a series of high-pressure high-temperature (HPHT) single-crystal diamond substrates are comprehensively studied by white-light optical interference microscopy, atomic-force microscopy, and X-ray diffraction analysis. Procedures that provide a means for characterizing the substrate parameters most critical for epitaxial application with the laboratory equipment are described. It is shown that the jewelry-type characterization of diamond substrates is insufficient to assess the possibility of their use for the epitaxial growth of chemical-vapor-deposited (CVD) diamond.