Fabrication and characterisation of microscale hemispherical shell resonator with diamond electrodes on the Si substrate
At a Glance
Section titled âAt a Glanceâ| Metadata | Details |
|---|---|
| Publication Date | 2019-02-27 |
| Journal | Micro & Nano Letters |
| Authors | Zhaoyang Liu, Weiping Zhang, Feng Cui, Jian Tang, Yuying Zhang |
| Institutions | Shanghai Jiao Tong University |
| Citations | 4 |
Abstract
Section titled âAbstractâA selfâaligned fabrication method is employed for microscale hemispherical shell resonator with integrated diamond electrodes on a silicon (Si) substrate. The millimetreâscale threeâdimensional (3D) hemispherical shell resonator, with integrated electrostatic excitation and capacitive detection transducers for full control of the resonator, is fabricated on the Si substrate by employing a microelectromechanical systems process. The eight integrated diamond electrodes evenly distributed outside the hemispherical shell are fabricated using a selfâaligned method, which ensures uniform capacitive gap along the whole circumference. The Boronâdoped polycrystalline diamond, a material with low thermoâelastic damping and low surface losses to reach the high quality, is used as the millimetreâscale 3D hemispherical shell resonator with integrated electrodes. The fabrication process enables the production of almost perfect hemisphere mould (<2% roundness variation) with an average surface roughness of 3 nm. Vibration modes and frequencies are carried out by a scanning laser Doppler vibrometer; the elliptical mode frequency is determined to be at 81.3 kHz, with the two M = 2 degenerate modes having a relative frequency mismatch of 0.86%. This process can be further optimised to fabricate highâquality and fullâsymmetric microscale hemispherical resonator gyroscopes in batch.