High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2019-02-15 |
| Journal | Sensors and Materials |
| Authors | HsiāShan Huang, Sean Wu |
| Institutions | Fujian Polytechnic of Information Technology, Tung Fang Design Institute |
Abstract
Section titled āAbstractāShear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research.The propagation characteristics of SAW in four composite structures according to the positions of interdigital transducer (IDT) electrodes and/or thin metal films were investigated theoretically.Those composite SAW substrates exhibited excellent SH SAW properties and have the potential for further application in biological and liquid SAW sensors.