On the Possibilities of Multilayer Mirrors for Measuring the Concentration of Boron Impurities in Diamond
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2019-03-01 |
| Journal | Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques |
| Authors | С. А. Гарахин, В. Н. Полковников, Н. И. Чхало |
| Institutions | Institute for Physics of Microstructures |
Abstract
Section titled “Abstract”An X-ray optical scheme for studying boron impurities in diamond substrates by X-ray fluorescence analysis is proposed. The scheme is analyzed and the sensitivity of the method to boron impurities in diamond is determined. The main ways of increasing the sensitivity are considered. It is shown that when a target is excited by AlKα radiation a boron impurity of ~20 ppm can be detected. When СKα radiation is used, the sensitivity is limited by the detector operating speed and is 0.07 ppm. The sensitivity of the X-ray optical scheme is 0.004 ppm.
Tech Support
Section titled “Tech Support”Original Source
Section titled “Original Source”References
Section titled “References”- 2013 - Laboratory Micro-X-Ray Fluorescence Spectroscopy. Instrumentation and Applications
- 2012 - Theory and Practice of X-Ray Fluorescence Analysis
- 2006 - Encyclopedia of Analytical Chemistry
- 2006 - Encyclopedia of Analytical Chemistry