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Optically Coherent Nitrogen-Vacancy Centers in Micrometer-Thin Etched Diamond Membranes

MetadataDetails
Publication Date2019-05-28
JournalNano Letters
AuthorsMaximilian Ruf, Mark IJspeert, Suzanne van Dam, Nick de Jong, Hans van den Berg
InstitutionsNetherlands Organisation for Applied Scientific Research, QuTech
Citations97

Diamond membrane devices containing optically coherent nitrogen-vacancy (NV) centers are key to enable novel cryogenic experiments such as optical ground-state cooling of hybrid spin-mechanical systems and efficient entanglement distribution in quantum networks. Here, we report on the fabrication of a (3.4 ± 0.2) μm thin, smooth (surface roughness r<sub>q</sub> < 0.4 nm over an area of 20 μm by 30 μm) diamond membrane containing individually resolvable, narrow linewidth (< 100 MHz) NV centers. We fabricate this sample via a combination of high-energy electron irradiation, high-temperature annealing, and an optimized etching sequence found via a systematic study of the diamond surface evolution on the microscopic level in different etch chemistries. Although our particular device dimensions are optimized for cavity-enhanced entanglement generation between distant NV centers in open, tunable microcavities, our results have implications for a broad range of quantum experiments that require the combination of narrow optical transitions and micrometer-scale device geometry.