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Room temperature bonding of GaN on diamond by using Mo/Au nano-adhesion layer

MetadataDetails
Publication Date2019-05-01
AuthorsKang Wang, Kun Ruan, Wenbo Hu, Shengli Wu, Hongxing Wang
InstitutionsXi’an Jiaotong University
Citations1

For solving the heat dissipation of high-power GaN devices, GaN was bonded on diamond at room temperature by using Mo/Au nano-adhesion layer. For a bonded GaN-on-diamond sample, the voidage is less than 3.0%, and the tensile strength reaches 6.8 MPa.

  1. 2013 - A new high power GaN-on-Diamond HEMT with low-temperature bonded substrate technology