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RF Performance of Hydrogenated Single Crystal Diamond MOSFETs

MetadataDetails
Publication Date2019-06-01
AuthorsCui Yu, Chuangjie Zhou, Jianchao Guo, Zezhao He, Qingbin Liu
InstitutionsHebei Semiconductor Research Institute, Xi’an Jiaotong University
Citations10

Hydrogenated diamond MOSFETs with gate length of 350 nm are fabricated by a self-aligned process on (001)-oriented single crystal diamond substrate. The hydrogen-terminated diamond MOSFETs show maximum drain current density of 233 mA/mm at V <sub xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;GS&lt;/sub> =-4 V, and transconductance of 62 mS/mm. The maximum output power density reaches 815 mW/mm at 2 GHz, which is the highest reported value for diamond transistors measured at 2 GHz.

  1. 2012 - Diamond Field-Effect Transistors with 1.3A/mm Drain Current Density by Al2O3 Passivation Layer [Crossref]