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High Output Current Boron-Doped Diamond Metal-Semiconductor Field-Effect Transistors

MetadataDetails
Publication Date2019-09-24
JournalIEEE Electron Device Letters
AuthorsJiangwei Liu, Tokuyuki Teraji, Bo Da, Yasuo Koide
InstitutionsNational Institute for Materials Science
Citations24

Schottky diodes and metal-semiconductor field-effect transistors (MESFETs) are fabricated on a quite smooth and high boron doping level diamond epitaxial layer. Forward current density maximum for the Schottky diode is 0.6 A cm <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;-2&lt;/sup> with the on/off ratio higher than 10 <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;8&lt;/sup> . Ideality factor and barrier height for Pt metal on the boron-doped diamond are evaluated to be 1.07 and 1.38 eV, respectively. Drain current maximum for the MESFET is -0.55mA mm <sup xmlns:mml=ā€œhttp://www.w3.org/1998/Math/MathMLā€ xmlns:xlink=ā€œhttp://www.w3.org/1999/xlinkā€&gt;-1&lt;/sup> , which is nine times higher than that of the previous report. Origin of it is possibly attributed to the good surface quality and high boron concentration for the B-diamond.

  1. 1972 - threshold voltages of normally off mesfet’s [Crossref]