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6CCVD Research

Research on the mechanism of micromachining of CVD diamond by femtosecond laser

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2019-09-10
JournalFerroelectrics
AuthorsYu Sun, Henri Dou, Muxun Xu, Jianlei Cui, Xuesong Mei
InstitutionsXiā€™an Institute of Optics and Precision Mechanics, Xiā€™an Jiaotong University
Citations37

Abstract

Section titled ā€œAbstractā€

<p>Diamond is an excellent material in terms of hardness, thermal conductivity and chemical stability. In order to broaden its application area, the interaction mechanism of CVD diamond processed by femtosecond laser is analyzed based on laser micromachining technology. Through the threshold theory, the ablation threshold of CVD diamond is calculated. At the same time, the graphitization phase transition occurred in the diamond. The internal elements before and after the ablation of diamond by femtosecond laser are characterized by X-ray energy spectrum analysis. The changes of element content and bonding form are analyzed, and the relevant graphitization mechanism is revealed.</p>

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 1993 - Diamond Films Technol

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