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650 mW/mm output power density of H‐terminated polycrystalline diamond MISFET at 10 GHz

MetadataDetails
Publication Date2020-01-14
JournalElectronics Letters
AuthorsCui Yu, Chuang Jie Zhou, Jian Chao Guo, Ze He, Hong Xing Wang
InstitutionsHebei Semiconductor Research Institute, Xi’an Jiaotong University
Citations19

In this work, metal-insulator-semiconductor field effect transistors (MISFET) with gate length of 350 nm were fabricated on hydrogen‐terminated polycrystalline diamond by a self‐aligned process. Aluminium film with thickness of 2 nm was evaporated on the sample and formed self‐oxidised alumina to act as the gate dielectric. The devices show good direct current and radio frequency performances with a maximum frequency of oscillation ( f max ) of 34 GHz and continuous‐wave output power density of 650 mW/mm at 10 GHz.

  1. 2019 - RF performance of hydrogenated single crystal diamond MOSFETs
  2. 2018 - Diamond RF transistor technology with ft = 41 GHz and fmax = 44 GHz