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Peculiarities of admittance spectroscopy study of wide bandgap semiconductors on the example of diamond

MetadataDetails
Publication Date2020-01-01
JournalE3S Web of Conferences
AuthorsAnna Solomnikova, Vadim Lukashkin, Oleg Derevianko
InstitutionsPeter the Great St. Petersburg Polytechnic University, Saint Petersburg State Electrotechnical University
Citations1
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This study focuses on optimizing admittance spectroscopy (AS) techniques to accurately characterize wide bandgap semiconductors (WBS), specifically boron-doped diamond, where incomplete impurity ionization presents a significant measurement challenge.

  • Core Value Proposition: Established a robust methodology for high-precision determination of impurity activation energy (Ea) in WBS by systematically mitigating systematic and random experimental errors.
  • Material and Impurity: Single-crystal diamond (HPHT synthesized) doped with boron (p-type acceptor).
  • Key Achievement (Ea): Boron activation energy was accurately determined as 293 ± 2 meV, achieving a Mean Squared Error (MSE) of less than 1%.
  • Signal/Noise Optimization: The test signal amplitude was increased to 80 meV to overcome the low conductance response caused by the low free carrier concentration (0.2% ionization at room temperature).
  • Thermal Hysteresis Elimination: The temperature ramp rate was drastically reduced to approximately 0.5 K/min to ensure thermal equilibrium and eliminate hysteresis in the conductance spectra.
  • Thermal Stabilization: A minimum thermostating time of 15 minutes was established as optimal for acquiring accurate frequency conductance spectra (G-f), preventing shifts in the conductance peak frequency.
ParameterValueUnitContext
Boron Activation Energy (Ea)293 ± 2meVCalculated from thermal conductance spectra
Mean Squared Error (MSE)< 1%Precision of Ea calculation
Optimized Test Signal Amplitude80meVUsed to maximize signal/noise ratio
Optimized Temp. Ramp Rate~0.5K/minUsed to eliminate thermal hysteresis
Minimum Thermostating Time15minutesRequired for accurate G-f spectra acquisition
Schottky Contact MaterialPlatinum (Pt)N/AUpper contact
Schottky Contact Diameter130”mSize of circular contacts
Contact Thickness100nmPt Schottky and Ohmic contacts
Measurement Temperature Range20 - 450°CJanis CCR-10-2 probe station capability
Measurement Frequency Range1 kHz - 2MHzAgilent E4980A RLC-meter capability
Diamond Ionization at RT0.2%Challenge for electrical characterization
Baliga Figure of Merit (BFOM)474Normalized to Si=1High-power switching potential
Johnson Figure of Merit (JFOM)6009Normalized to Si=1High-frequency potential

The study utilized Dynamic Admittance Spectroscopy (DAS) to characterize boron-doped diamond, focusing heavily on optimizing the measurement environment to account for the material’s wide bandgap properties.

  1. Sample Synthesis and Structure:
    • Single-crystal diamond plates were synthesized using the High Pressure High Temperature (HPHT) method.
    • A multisectorial structure was used, containing areas of varying boron concentration (low-doped/white and heavily-doped/blue).
  2. Contact Fabrication:
    • Schottky Contact: An array of 130 ”m diameter, 100 nm thick Platinum (Pt) contacts were deposited on the upper side at 300 °C.
    • Ohmic Contact: A complete 100 nm thick Pt layer was deposited on the bottom side at 70 °C.
  3. Experimental Setup:
    • Measurements were performed using an Agilent E4980A RLC-meter and a Janis CCR-10-2 closed-cycle helium probe station, controlled by a LakeShore 336 temperature controller.
    • The sample was placed on a ceramic cell (rather than a Sitall wafer) inside the probe station to reduce induced noise and minimize the thermal capacity of the substrate.
  4. Signal/Noise Ratio Adjustment:
    • The test signal amplitude was increased from 30 meV to 80 meV. This increase was necessary to obtain a measurable conductance response from the low-doped diamond, compensating for the low concentration of free carriers.
  5. Temperature Control Optimization:
    • The temperature change speed (Ramp Rate) was reduced from an initial 4 K/min to approximately 0.5 K/min to eliminate significant thermal hysteresis in the conductance spectra.
    • A thermostating time of 15 minutes was implemented before recording frequency conductance spectra (G-f) to ensure the sample reached the desired setpoint temperature, preventing a 20% error in peak frequency determination.
  6. Data Extraction:
    • The activation energy (Ea) of the boron impurity was calculated from the Arrhenius plot derived from the thermal conductance spectra (G/ω vs. T).

The accurate characterization of boron activation energy in diamond is crucial for developing high-performance electronic devices that leverage diamond’s superior material properties compared to traditional semiconductors (Si, SiC, GaN).

Industry SectorApplication FocusRelevance of Diamond Properties
High-Power ElectronicsPower converters, high-voltage switches, inverters, and motor drives.Highest Baliga Figure of Merit (BFOM = 474x Si), enabling low loss and high breakdown voltage.
High-Frequency RF/Microwave5G/6G base stations, radar systems, high-power amplifiers.Highest Johnson Figure of Merit (JFOM = 6009x Si), allowing for high-speed, high-power operation.
Thermal ManagementHeat spreaders, substrates for high-density integrated circuits (ICs) and photonics.Highest Keyes Figure of Merit (KFOM = 35x Si) due to giant thermal conductivity, crucial for reliability.
Semiconductor ManufacturingQuality control and process optimization for WBS substrates (e.g., SiC, GaN, Diamond).Accurate impurity characterization (Ea) ensures predictable doping profiles and device yield.
Extreme Environment ElectronicsSensors and electronics operating under high temperature or radiation conditions.Diamond’s large bandgap and robust structure ensure stability where Si or GaAs fail.
View Original Abstract

To improve the performance characteristics of power and high-frequency electronics, wide bandgap semiconductors are now widely used. This paper presents consideration of features arising during exploration of electronic characteristics of wide bandgap materials. We use the admittance spectroscopy method for analyzing free carrier concentration and boron-impurity activation energy in semiconductor diamond. The special aspect that should be taken into account while studying wide bandgap materials is incomplete ionization of impurity. In this work we adjust the experimental conditions, basing on the previous experience, in particular reduce signal/noise ratio and reckon with heat capacity of the samples and substrate. As a result we obtained high quality conductance spectra and activation energy of boron impurity in low-doped diamond.