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Hydrogen terminated diamond diode with high breakdown voltage

MetadataDetails
Publication Date2020-04-17
JournalSixth Symposium on Novel Optoelectronic Detection Technology and Applications
AuthorsJinfeng Zhang, Jun Liu, Qi He, Zeyang Ren, Kai Su
InstitutionsWuhu Institute of Technology, Xidian University

The hydrogen terminated diamond schottky barrier diode was fabricated on single crystal diamond substrate that grown by using microwave plasma chemical vapor deposition system. Current-voltage characteristics of the device with radius of Schottky electrode of 70μm and the Schottky-Ohmic interspace of 10 &mu;m was measured. The device shows good rectification properties. The current density is 5A/cm<sup>2</sup> at the forward voltage of -4V, and a low reverse current is ~10-7 A/cm<sup>2</sup> is obtained. The conduction mechanism of the device was analyzed, and the barrier height of Schottky contact was calculated to be 1.01eV. The direct current characteristics of the devices with different Schottky-Ohmic interspaces or Schottky areas are compared. In addition a high reverse breakdown voltage of 1200V has been achieved on the device with the interspace of 10&mu;m, which suggests that the electric field reaches 1.2 MV/cm. This device has potential to be used in the fields of high power and high voltage application.