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Peculiarities of Microwave Lamb Wave Excitation in Composite SAW Resonator Based on Diamond Substrate

MetadataDetails
Publication Date2020-07-01
AuthorsГ. М. Квашнин, B. P. Sorokin, С. И. Бурков
InstitutionsTechnological Institute for Superhard and Novel Carbon Materials, Siberian Federal University
Citations2

We study in detail both experimentally and theoretically Lamb-like wave excitation up to 7.3 GHz in the piezoelectric layered structures “Me-IDT/AlN/(100) diamond” ( <tex xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;&#36;\text&#123;Me&#125; =\text{Pt}$</tex> , Al) configured as a SAW resonator. Theoretical investigation identifying Lamb wave types by Finite Element Modeling as well as by direct solution of the characteristic equations has been fulfilled. Resonance curves for Lamb-like waves have a higher quality factor <tex xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;&#36;Q&#36;&lt;/tex> compared to surface acoustic waves propagating on the same substrates. We observed experimentally an unusual effect of a significant increasing in <tex xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;&#36;Q&#36;&lt;/tex> -factor of Lamb wave resonance curves with frequency, from a value of 760 at 1.5 GHz to 3,400 at ∼7 GHz. It was shown that the peculiarities of Lamb wave excitation were closely connected with IDT diffraction effects.

  1. 2020 - Excitation of surface acoustic waves and Lamb waves on microwave band in a piezoelectric layered structure based on diamond