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6CCVD Research

Front-side diamond deposition on the GaN membranes

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2020-10-11
AuthorsTibor IzsĆ”k, G. Vanko, Milan DrÅ¾Ć­k, Stephan Kasemann, Johann Zehetner
InstitutionsCzech Academy of Sciences, Institute of Physics, Institute of Chemistry of the Slovak Academy of Sciences

Abstract

Section titled ā€œAbstractā€

We present technological issues in the deposition of diamond films on the GaN membranes. Many wrinkles and the thicker diamond layer were observed at the membrane centre and poor quality diamond outside the membrane area. The deflection of the membranes were analyzed by a bulging method using white light interferometry. The membrane bending was discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials. Optimized technological procedure was proposed to obtain both-side diamond-coated GaN membranes with minimized effect of wrinkling and induced residual stress.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2015 - Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating
  2. 2016 - Temperature-dependent stress in diamond-coated AlGaN/GaN heterostructures [Crossref]
  3. 2018 - High Temperature AlGaN/GaN Membrane Based Pressure Sensors [Crossref]

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