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6CCVD Research

Synthesis of Diamond on SiC by Microwave Plasma Chemical Vapor Deposition - Comparison of Silicon-Face and Carbon-Face

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2020-11-16
JournalMaterials science forum
AuthorsXue Min Zhang, Chang Yan, Chun Hong Zeng, Yi Qun Wang, Bao Shun Zhang
InstitutionsSuzhou Institute of Nano-tech and Nano-bionics, Institute of Nanotechnology
Citations1

Abstract

Section titled ā€œAbstractā€

Diamond is arguably the best candidate material for heat dissipation applications, especially in high-power electronic devices. Silicon carbide (SiC) is a kind of wide band gap material, which can be used in applications of silicon (Si) components to reach the performance limits. In this paper, thin diamond films were successfully deposited on C-face and Si-face of 6H-SiC substrates respectively using MPCVD at temperatures from 800 to 1050 Ā°C. SEM images indicated the growth quality comparison of the two faces of SiC. The diffraction peaks of the diamond (111), (220), and (311) crystal planes can be observed by XRD measurement, and the intensity of the diamond diffraction peaks grown on the C-face is stronger than that on Si-face. The growth process was analyzed by Raman spectrum. FWHM of diamond Raman spectra on Si-face and C-face are 6.07cm -1 and 5.47cm -1 respectively. All above measurement results show that the diamond grown on the C-face has higher crystal quality than that on Si-face of SiC.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. **** - Diamond semiconductor technology for RF device applications [Crossref]
  2. **** - Studies on nucleation process in diamond CVD: an overview of recent developments [Crossref]
  3. **** - CVD diamond films: from growth to applications [Crossref]
  4. **** - Si-doped diamond films prepared by chemical vapour deposition [Crossref]
  5. **** - Effectiveness of a hot-filament chemical vapor deposition method for preparation of a boron-doped superconducting diamond film with higher superconducting transition temperature [Crossref]
  6. **** - Deposition of large area uniform diamond films by microwave plasma CVD [Crossref]
  7. 2017 - Vertical-Substrate MPCVD Epitaxial Nanodiamond Growth [Crossref]

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