Influence of current modulation waveform on polycrystalline diamond film deposition using modulated induction thermal plasmas—numerical and experimental studies
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2021-01-28 |
| Journal | Journal of Physics D Applied Physics |
| Authors | Kazufumi Hata, Yasunori Tanaka, Naoki Kano, Yusuke Nakano, Tatsuo Ishijima |
| Institutions | Kanazawa University |
| Citations | 1 |
Abstract
Section titled “Abstract”Abstract In this paper, the influence of amplitude-modulated coil current waveform on polycrystalline diamond deposition was studied using modulated induction thermal plasma (M-ITP) with numerical and experimental approaches. The M-ITP is useful in undertaking the nucleation of diamond particles necessary for the first stage of diamond film deposition. First, numerical thermo-fluid calculations were conducted for Ar M-ITP with CH 4 /H 2 feedstock gas to investigate the influence of a modulation waveform on particle fluxes of different hydrocarbon species onto a Si substrate. Furthermore, experiments were performed to fabricate polycrystalline diamond film deposition using M-ITP with different modulation waveforms. The modulation waveform for the coil current was set as a rectangular waveform, a saw-tooth waveform and a reverse saw-tooth waveform in the calculations and the experiments. The experimental results showed that the saw-tooth M-ITP provided a higher deposition rate, of 2.05 µ m h −1 , than other waveforms. This could be attributed to the higher fluxes of neutral hydrocarbons in the saw-tooth M-ITP according to the calculation results.
Tech Support
Section titled “Tech Support”Original Source
Section titled “Original Source”References
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