Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2021-02-18 |
| Journal | Applied Physics Express |
| Authors | Huanying Sun, Xiulin Shen, Liwen Sang, Masataka Imura, Yasuo Koide |
| Institutions | State Key Laboratory of Modern Optical Instruments, Institute of Microelectronics |
| Citations | 8 |
Abstract
Section titled āAbstractāAbstract We report on the precise measurement of the thermal mismatch induced stress by dynamic resonance method. The metallic electrodes are deposited on a single-crystal diamond microelectromechanical resonator for the Joule heating and stress generation. The results show that the resonance frequency is linearly dependent on the induced stress. The stress resolution in this work is as precise as 10 4 Pa, which is three orders of magnitude better than those obtained by Raman and X-ray diffraction methods.