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Polycrystalline diamond growth on β-Ga2O3 for thermal management

MetadataDetails
Publication Date2021-04-05
JournalApplied Physics Express
AuthorsMohamadali Malakoutian, Yiwen Song, Chao Yuan, Chenhao Ren, James Spencer Lundh
InstitutionsApplied Research Laboratory at the University of Hawai‘i, Georgia Institute of Technology
Citations50

Abstract We report polycrystalline diamond epitaxial growth on β -Ga 2 O 3 for device-level thermal management. We focused on establishing diamond growth conditions on β -Ga 2 O 3 accompanying the study of various nucleation strategies. A growth window was identified, yielding uniform-coalesced films while maintaining interface smoothness. In this first demonstration of diamond growth on β -Ga 2 O 3 , a diamond thermal conductivity of 110 ± 33 W m −1 K −1 and a diamond/ β -Ga 2 O 3 thermal boundary resistance of 30.2 ± 1.8 m 2 K G −1 W −1 were measured. The film stress was managed by growth optimization techniques preventing delamination of the diamond film. This work marks the first significant step towards device-level thermal management of β -Ga 2 O 3 electronic devices.