Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

At a Glance

Metadata	Details
Publication Date	2021-06-01
Journal	Materials
Authors	Qiang Wei, Xiaofan Zhang, Fang Lin, Ruozheng Wang, Genqiang Chen
Institutions	Xi’an Jiaotong University
Citations	17
Analysis	Full AI Review Included

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Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized channels using the epitaxial lateral overgrowth technique. Raman and SEM methods were applied to analyze both types of growth layer characterization. The hollowness of the microchannels was measured using an optical microscope. According to the findings, the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench produced improved SCD surface morphology and crystal quality.

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Original Source

DOI: https://doi.org/10.3390/ma14113006

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