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Crack Resistance of Silicon-Carbide Plates in Diamond Grinding

MetadataDetails
Publication Date2021-07-01
JournalRussian Engineering Research
AuthorsSergey Bishutin, S. S. Alekhin
InstitutionsBryansk State Technical University
Citations2

A method is proposed for identifying diamond-grinding conditions that ensure crack stability of silicon-carbide plates, with satisfactory productivity, taking account of the tensile stress in subsequent manufacturing operations. By that means, the waste in the production of semiconductor instruments may be decreased.

  1. 1994 - Konstruirovanie mahsin (Engineering of Machines)