Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2021-07-01 |
| Journal | Journal of the Korean Society for Precision Engineering |
| Authors | Ui Seok Lee, Chan Young Yang, Ju Hyeon Lee, Bo Hyun Kim |
| Citations | 6 |
Abstract
Section titled āAbstractāSilicon carbide (SiC) has been used as a material for semi-conductor, molds, and micro-electro-mechanical systems (MEMS) because of its superior thermal, electrical, and mechanical properties. However, micro machining of SiC is very challenging due to its hardness and brittleness. This paper presents an experimental study of micro hole drilling of SiC. In this study, polycrystalline diamond (PCD) was used as a tool to overcome the hardness of SiC. The micro PCD tool with a diameter of 110 Ī¼m was fabricated by micro electrical discharge machining (EDM). Micro drilling was conducted with varying machining parameters such as tool rotational speed and feed rate. Effects of surface roughness of the tool and lubrication method were also investigated.