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Quantum Photonic Interface for Tin-Vacancy Centers in Diamond

MetadataDetails
Publication Date2021-07-26
JournalPhysical Review X
AuthorsAlison E. Rugar, Shahriar Aghaeimeibodi, Daniel Riedel, Constantin Dory, Haiyu Lu
InstitutionsSLAC National Accelerator Laboratory, Stanford University
Citations95
AnalysisFull AI Review Included

This research reports the first successful integration and Purcell enhancement of Tin-Vacancy (SnV-) centers in a diamond photonic crystal cavity, establishing a highly efficient spin-photon interface critical for scalable quantum networks.

  • High Efficiency Interface: The coupling of the SnV Zero-Phonon Line (ZPL) emission to a one-dimensional photonic crystal cavity resulted in a 40-fold increase in emission intensity.
  • Strong Purcell Enhancement: The system achieved an experimental Purcell factor (FP) of 25 and a 10-fold reduction in the excited-state lifetime (from 7.0 ns to 0.69 ns).
  • Near-Unity Coupling: The probability of an excited state decaying into the cavity mode via the ZPL (ÎČ factor) reached 90.1 ± 1.1%, enabling a ZPL photon creation rate greater than 1 GHz.
  • Single Photon Source: Second-order autocorrelation measurements confirmed the enhanced SnV center acts as a single-photon source, with g(2)(0) = 0.29 ± 0.08.
  • Scalability Advantage: SnV centers exhibit long spin coherence times accessible at temperatures above 1 K, eliminating the need for complex dilution refrigerators required by other platforms (like SiV centers), making this platform highly promising for practical quantum networks.
  • Fabrication Method: Devices were fabricated using a scalable quasi-isotropic diamond undercut method combined with a shallow ion implantation and growth (SIIG) technique for precise SnV center generation.
ParameterValueUnitContext
Operating Temperature~5KCryogenic measurement environment
Cavity Type1D Photonic Crystal NanobeamN/ASuspended diamond waveguide
Measured Quality Factor (Q)2135 ± 170N/ATransmission measurement (Fig 1e)
Simulated Mode Volume (Vmode)0.56 (λ/η)3N/AFDTD simulation
Waveguide Width (w)300nmCavity design parameter
Waveguide Thickness (h)200nmCavity design parameter
Cavity Resonance Wavelength (λres)619.6nmTuned to SnV C transition ZPL
SnV ZPL Wavelength (C transition)619.6nmHighest count rate transition
Emission Intensity Enhancement40 ± 4foldOn-resonance vs. off-resonance (Fig 2b)
Maximum Saturation Intensity ContrastUp to 30timesResonant vs. off-resonant saturation data
Off-Resonance Lifetime (τoff)6.980 ± 0.078nsNon-resonant radiative decay rate
On-Resonance Lifetime (τon)0.685 ± 0.014nsExcited-state lifetime reduction (10.1 ± 1.2 fold)
Experimental Purcell Factor (FP)24.8 ± 3.0N/ACorrected for non-unity radiative probability
Beta Factor (ÎČ)90.1 ± 1.1%Probability of emission into cavity mode
Second-Order Autocorrelation (g(2)(0))0.29 ± 0.08N/AConfirms single-photon emission
Sn Ion Implantation Energy1keVShallow Ion Implantation and Growth (SIIG)
Sn Ion Implantation Dose5 x 1011cm-2SnV center generation
Diamond Overgrowth Thickness90nmHigh-quality diamond film

The devices were fabricated on electronic-grade single-crystalline diamond using a combination of shallow ion implantation and quasi-isotropic etching techniques.

1. SnV Center Generation (Shallow Ion Implantation and Growth - SIIG)

Section titled “1. SnV Center Generation (Shallow Ion Implantation and Growth - SIIG)”
  • Substrate Preparation: The diamond chip (Element Six) was cleaned in a boiling tri-acid solution (1:1:1 Sulfuric/Nitric/Perchloric acids). The top 500 nm was removed via O2 plasma etch.
  • Implantation: 120Sn+ ions were implanted shallowly at 1 keV with a dose of 5 x 1011 cm-2.
  • Overgrowth (CVD): A 90 nm high-quality diamond film was subsequently grown using Microwave Plasma Chemical Vapor Deposition (MPCVD) under the following conditions:
    • Stage Temperature: 650° C
    • Microwave Power: 1100 W
    • Pressure: 23 Torr
    • Gas Flow: 300 sccm H2, 0.5 sccm CH4

2. Nanophotonic Cavity Fabrication (Quasi-Isotropic Etching)

Section titled “2. Nanophotonic Cavity Fabrication (Quasi-Isotropic Etching)”
  • Masking: A 200 nm SixNy layer was grown and patterned via electron-beam lithography using hydrogen silsesquioxane (FOx-16) resist.
  • Mask Etch: The SixNy was etched using SF6, CH4, and N2 Reactive Ion Etch (RIE).
  • Diamond Etch (Anisotropic): The patterned SixNy mask was used for an anisotropic O2 RIE of the diamond substrate.
  • Sidewall Passivation: 30 nm of Al2O3 was deposited via Atomic Layer Deposition (ALD). Horizontal Al2O3 planes were removed using Cl2, BCl2, and N2 RIE, leaving only the diamond sidewalls covered.
  • Undercut (Quasi-Isotropic Etch): A second anisotropic O2 RIE exposed bare diamond sidewalls, followed by the critical quasi-isotropic O2 plasma etch step:
    • Temperature: High temperature (300° C)
    • Bias: Zero forward bias
    • Power: High inductively coupled plasma (ICP) power
    • Result: This etch preferentially undercuts the structure along the {110} planes, releasing the nanobeam waveguides.
  • Setup: Home-built confocal microscope setup at cryogenic temperatures (~5 K).
  • Cavity Tuning: Argon gas condensation was used to red-shift the cavity resonance wavelength by increasing the effective refractive index of the device. Heating (local laser or heated stage) reversed the condensation.
  • Lifetime Measurement: Time-Correlated Single Photon Counting (TCSPC) was used, exciting the SnV center with a pulsed supercontinuum laser (450 nm long-pass and 550 nm short-pass filters) and detecting the emission through a 568 nm long-pass filter and monochromator.

The successful development of an efficient, coherent, and scalable spin-photon interface using SnV centers in diamond has direct implications for several high-growth quantum technology sectors:

  • Quantum Networks and Communication:
    • Quantum Repeaters: SnV centers serve as highly efficient quantum nodes, enabling long-distance entanglement distribution without the high decoherence rates associated with NV centers.
    • Scalable Architectures: The high ÎČ factor (90%) ensures that the majority of emitted photons are channeled into the waveguide, maximizing coupling efficiency into optical fiber networks.
  • Quantum Computing:
    • Solid-State Qubits: SnV centers offer superior optical coherence compared to NV centers, making them excellent candidates for solid-state quantum memories and processors integrated into photonic circuits.
    • Hybrid Integration: The demonstrated platform is compatible with on-chip photonic architectures, paving the way for large-scale quantum information processing systems.
  • Quantum Sensing:
    • High-Fidelity Readout: The strong Purcell enhancement facilitates fast, high-fidelity optical readout of the spin state, improving the performance of diamond-based quantum sensors.
  • Diamond Material Science:
    • Advanced CVD/Implantation: The SIIG method developed for precise, shallow placement of SnV centers (90 nm depth) is a key enabling technology for manufacturing high-performance diamond quantum devices.
View Original Abstract

The realization of quantum networks critically depends on establishing\nefficient, coherent light-matter interfaces. Optically active spins in diamond\nhave emerged as promising quantum nodes based on their spin-selective optical\ntransitions, long-lived spin ground states, and potential for integration with\nnanophotonics. Tin-vacancy (SnV$^{\,\textrm{-}}$) centers in diamond are of\nparticular interest because they exhibit narrow-linewidth emission in\nnanostructures and possess long spin coherence times at temperatures above 1 K.\nHowever, a nanophotonic interface for SnV$^{\,\textrm{-}}$ centers has not yet\nbeen realized. Here, we report cavity enhancement of the emission of\nSnV$^{\,\textrm{-}}$ centers in diamond. We integrate SnV$^{\,\textrm{-}}$\ncenters into one-dimensional photonic crystal resonators and observe a 40-fold\nincrease in emission intensity. The Purcell factor of the coupled system is 25,\nresulting in channeling of the majority of photons ($90\%$) into the cavity\nmode. Our results pave the way for the creation of efficient, scalable\nspin-photon interfaces based on SnV$^{\,\textrm{-}}$ centers in diamond.\n