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X-ray diffraction imaging of diamond x-ray optics in the laboratory

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2021-07-30
AuthorsA. A. Barannikov, Sergey Shevyrtalov, Maxim Polikarpov, I. Snigireva, A. Snigirev
InstitutionsPaul Scherrer Institute, ETH Zurich
Citations2

Abstract

Section titled ā€œAbstractā€

This paper presents the results of using the laboratory X-ray system to study the diamond X-ray optics: single-crystal diamond plates and diamond X-ray parabolic refractive lenses. The system is equipped with the Excillum MetalJet D2+ 70kV high-brightness X-ray source with a liquid GaIn anode. To analyze the defects of the crystal structure, the X-ray diffraction imaging (topography) technique was applied. Two-dimensional images of the diamond plate were experimentally recorded from (111) crystal plane with 12 Ī¼m and 1.5 Ī¼m resolution. The images of the X-ray semi-lens were recorded from (400) and (220) crystal planes with 20 Ī¼m resolution. These topographs displayed various defects, such as growth striations and dislocations.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2013 - The upgrade programme for the structural biology beamlines at the European Synchrotron Radiation Facility-High throughput sample evaluation and automation
  2. 2006 - X-Ray metrology in semiconductor manufacturing
  3. 2018 - Liquid-metal-jet X-ray technology for nanoelectronics characterization and metrology

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