Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb 0.33 Al 0.67 N piezoelectric films/high-velocity substrates
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-01-06 |
| Journal | Japanese Journal of Applied Physics |
| Authors | Masashi Suzuki, Shoji Kakio |
| Institutions | University of Yamanashi |
| Citations | 4 |
Abstract
Section titled āAbstractāAbstract Piezoelectricity of YbAlN films has recently been shown to be almost as high as that of ScAlN films. YbAlN film surface acoustic wave (SAW) resonators are expected to have a high coupling factor. We theoretically investigated the propagation characteristics of first-mode Rayleigh SAWs (RSAWs) on Yb 0.33 Al 0.67 N film/high-velocity Si, sapphire, AlN, SiC, BN, and diamond substrates. The first-mode RSAWs on the YbAlN layered structures had high coupling factors, higher than those on ScAlN layered structures. An enhancement of the effective coupling factor of the first-mode RSAWs was observed in polarity inverted YbAlN film/BN or diamond substrate structures.