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Correlated Electrical Conductivities to Chemical Configurations of Nitrogenated Nanocrystalline Diamond Films

MetadataDetails
Publication Date2022-03-03
JournalNanomaterials
AuthorsAbdelrahman Zkria, Hiroki Gima, Eslam Abubakr, Ashraf M. Mahmoud, Ariful Haque
InstitutionsTexas State University, King Khalid University
Citations16
AnalysisFull AI Review Included

This research details the synthesis and characterization of nitrogen-doped Nanocrystalline Diamond (NCD) films, establishing a critical correlation between nitrogen content, chemical bonding configuration, and electrical conductivity for advanced electronic applications.

  • Core Value Proposition: Successful fabrication of low-activation energy, n-type NCD films using a scalable Physical Vapor Deposition (PVD) method (Coaxial Arc Plasma Gun, CAPG).
  • Electrical Performance: Electrical conductivity increased by several orders of magnitude (up to ~1 S/cm) as nitrogen content was raised from 3 at.% to 8 at.%.
  • Low Activation Energy: The thermal activation energy (Ea) decreased from 123 meV (3 at.% N) to 108 meV (8 at.% N), confirming efficient n-type semiconducting behavior.
  • Doping Mechanism Confirmation: Synchrotron Near-Edge X-ray Absorption Fine-Structure Spectroscopy (NEXAFS) proved that nitrogen doping weakens the diamond σ*C-C (sp3) phase.
  • Structural Correlation: The enhanced conductivity is directly attributed to the strengthening of π*C=N bonds formed at the grain boundaries (GBs), which act as sources for free electron generation.
  • Morphology: The deposited films were uniform, 400 nm thick, and exhibited a low root mean square (RMS) surface roughness of only 8 nm.
ParameterValueUnitContext
Synthesis MethodCoaxial Arc Plasma Gun (CAPG)PVDUsed for NCD film growth
Substrate Temperature550°CDuring deposition
Deposition Pressure53PaFinal operating pressure
N2/H2 Inflow Ratio (IN/H) Range0.3 to 1.5DimensionlessControls nitrogen doping level
Maximum Nitrogen Content8at.%Achieved at IN/H = 1.5
Film Thickness400nmMeasured via SEM cross-section
Surface Roughness (RMS)8nmMeasured via AFM
Highest Electrical Conductivity~100S/cmN 8 at.% film (at 500 K)
Lowest Activation Energy (Ea)108meVN 8 at.% film
Highest Activation Energy (Ea)123meVN 3 at.% film
Intrinsic Diamond Bandgap5.45eVReference property
Intrinsic Diamond Thermal Conductivity3320W m-1 K-1Reference property

The NCD films were synthesized using a Coaxial Arc Plasma Gun (CAPG) approach, a type of Physical Vapor Deposition (PVD).

  • Target: Bulk graphite (99.9% purity).
  • Substrate: p-type mirror-polished Si (100) or quartz (for electrical measurements).
  • Gas Mixture: H2 and N2 gases (3N purity).
  • Doping Control: Nitrogen concentration was controlled by varying the N2/H2 inflow ratio (IN/H) from 0.3 to 1.5.
  • Plasma Power: Applied voltage was 100 V; discharge pulse repetition rate was 5 Hz.
  • Pre-treatment: Substrates were cleaned using acetone, methanol, and deionized water before being fixed 15 mm from the target.
  • Morphological Analysis:
    • High-Resolution Scanning Electron Microscope (HRSEM) (15 kV, 10,000× magnification) for phase identification (nanograins in amorphous carbon matrix).
    • Atomic Force Microscopy (AFM, close contact mode) for surface roughness measurement.
  • Chemical Composition and Bonding:
    • X-ray Photoemission Spectroscopy (XPS): Used MgKα line (1253.6 eV) to quantify nitrogen content (N/C ratio) based on N1s and C1s peak areas.
    • Near-Edge X-ray Absorption Fine-Structure Spectroscopy (NEXAFS): Performed using synchrotron radiation (350 eV photon energy). This sensitive tool probed the structural evolution, specifically tracking the conversion of σC-C (sp3) bonds to πC=N (sp2) bonds at grain boundaries.
  • Electrical Characterization:
    • Conductivity Measurement: Van der Pauw method was used on films deposited on quartz substrates.
    • Activation Energy (Ea): Calculated from the temperature-dependent electrical conductivity (Arrhenius plot), confirming semiconducting behavior.

The unique combination of wide bandgap, high stability, and tunable n-type conductivity in NCD films makes them highly relevant for next-generation electronic and optoelectronic devices.

  • Deep-Ultraviolet (DUV) Optoelectronics: Diamond’s wide bandgap (5.45 eV) is ideal for DUV detectors, emitters, and light sources, particularly where high sensitivity and stability are required.
  • High-Power/High-Frequency Devices: The material’s intrinsic high thermal conductivity and chemical stability are crucial for developing robust transistors and diodes capable of operating efficiently at high temperatures and frequencies.
  • Semiconductor Heterojunctions: N-doped NCD films serve as the active layer in p-n heterojunction diodes (e.g., NCD/p-Si), offering potential for high rectification ratios and integration into existing silicon technology.
  • Advanced Sensing Platforms: The composite structure (nanograins embedded in an amorphous matrix) allows for tailored surface chemistry and electronic properties, applicable in electrochemical or biological sensors.
  • Cold Cathode Emitters: Control over the sp2 content and C=N bonding at grain boundaries influences electron emission characteristics, relevant for field emission displays and vacuum microelectronics.
View Original Abstract

Diamond is one of the fascinating films appropriate for optoelectronic applications due to its wide bandgap (5.45 eV), high thermal conductivity (3320 W m−1·K−1), and strong chemical stability. In this report, we synthesized a type of diamond film called nanocrystalline diamond (NCD) by employing a physical vapor deposition method. The synthesis process was performed in different ratios of nitrogen and hydrogen mixed gas atmospheres to form nitrogen-doped (n-type) NCD films. A high-resolution scanning electron microscope confirmed the nature of the deposited films to contain diamond nanograins embedded into the amorphous carbon matrix. Sensitive spectroscopic investigations, including X-ray photoemission (XPS) and near-edge X-ray absorption fine structure (NEXAFS), were performed using a synchrotron beam. XPS spectra indicated that the nitrogen content in the film increased with the inflow ratio of nitrogen and hydrogen gas (IN/H). NEXAFS spectra revealed that the σC-C peak weakened, accompanied by a πC=N peak strengthened with nitrogen doping. This structural modification after nitrogen doping was found to generate unpaired electrons with the formation of C-N and C=N bonding in grain boundaries (GBs). The measured electrical conductivity increased with nitrogen content, which confirms the suggestion of structural investigations that nitrogen-doping generated free electrons at the GBs of the NCD films.

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