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Ga2O3 – diamond for next generation power electronics

MetadataDetails
Publication Date2022-03-06
Journal2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
AuthorsAbhishek Mishra, Zeina Abdallah, Hyun‐Seop Kim, James W. Pomeroy, Michael J. Uren
InstitutionsUniversity of Bristol
Citations1

Ga <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;2&lt;/inf> O <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;3&lt;/inf> , with its ultra-wide bandgap and melt-grown substrates, offers the potential for low-cost >1 kV electronics. However, numerous challenges need to be overcome, in particular the lack of good p-doped Ga <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;2&lt;/inf> O <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;3&lt;/inf> and its low thermal conductivity. The potential for overcoming these intrinsic limitations of Ga <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;2&lt;/inf> O <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;3&lt;/inf> with integrated Ga <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;2&lt;/inf> O <inf xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”&gt;3&lt;/inf> - diamond junctions for power devices is discussed.

  1. 2018 - 2.44 kV Ga2O3 vertical trench Schottky barrier diodes with very low reverse leakage current