Diamond Semiconductor Devices for harsh environmental applications
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-03-06 |
| Journal | 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Authors | Hitoshi Umezawa |
| Institutions | National Institute of Advanced Industrial Science and Technology |
| Citations | 3 |
Abstract
Section titled āAbstractāDiamond is known as an ultimate semiconductor material composed of the lightest carbon group elements and expected to be used for the next-generation power electronic devices, high frequency high power devices and integrated circuits for harsh environmental applications. Recent progress in wafer technology and device processing techniques have improved the performance of semiconductor devices. In this paper, the state of the art of diamond semiconductor devices and processing, especially harsh environmental application technologies, will be introduced.