Diamond hollow cathode with axial magnetic field for high-density cold plasma source
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-05-16 |
| Journal | Applied Physics Express |
| Authors | Hisao Miyazaki, Hisashi Yoshida, S. Kimura |
| Institutions | Toshiba (Japan) |
| Citations | 1 |
Abstract
Section titled āAbstractāAbstract We present a high-density plasma source using a hollow cathode with an axial magnetic field. The hollow cathode consists of molybdenum plates coated by polycrystalline boron-doped diamond (PBDD) with a high yield of ion-induced secondary electrons. Impact ionization was promoted by gyromotion in the hollow cathode with a magnetic field. A normalized current density four orders of magnitude larger than that of a planar cathode without a magnetic field was obtained. The high-quality PBDD cathode enables lower discharge sustain voltage and higher current density without glow-to-arc transition compared with low-quality PBDD and other cathode materials.