High Temperature Performance of Enhanced Endurance Hydrogen Terminated Transparent Polycrystalline Diamond FET
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2022-05-16 |
| Journal | IEEE Electron Device Letters |
| Authors | Shaili Falina, Hiroshi Kawarada, Asrulnizam Abd Manaf, Mohd Syamsul |
| Institutions | Waseda University, Universiti Sains Malaysia |
| Citations | 9 |
Abstract
Section titled “Abstract”This letter reports on the high voltage operations and high temperature operations of the transparent polycrystalline diamond field-effect transistor (TPD-FET). The devices were fabricated with a wide range of wide gate-drain lengths ( <inline-formula xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”> <tex-math notation=“LaTeX”>${L}{\textit {GD}}$ </tex-math></inline-formula> ) and a thick Al <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”>2</sub> O <sub xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”>3</sub> passivation layer of 400 nm. Voltage breakdowns of more than 1000 V have been observed in high voltage measurements. The temperature dependence and performance of the devices at RT to 673 K were also shown. As the temperature was varied, the maximum drain currents ( <inline-formula xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”> <tex-math notation=“LaTeX”>${I}{{D max}}$ </tex-math></inline-formula> ) for different <inline-formula xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”> <tex-math notation=“LaTeX”>${L}_{\textit {GD}}$ </tex-math></inline-formula> devices increased significantly from 33.8 mA/mm - 72.8 mA <inline-formula xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”> <tex-math notation=“LaTeX”>$/$ </tex-math></inline-formula> mm to 86.0 mA/mm - 116.4 mA <inline-formula xmlns:mml=“http://www.w3.org/1998/Math/MathML” xmlns:xlink=“http://www.w3.org/1999/xlink”> <tex-math notation=“LaTeX”>$/$ </tex-math></inline-formula> mm in terms of absolute values. The findings demonstrate the advantages and potential of diamond-based devices in high temperature conditions.