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Formation of p-n+diamond homojunctions by shallow doping of phosphorus through liquid emersion excimer laser irradiation

MetadataDetails
Publication Date2022-06-06
JournalMaterials Research Letters
AuthorsEslam Abubakr, Shinya Ohmagari, Abdelrahman Zkria, Hiroshi Ikenoue, Julien Pernot
InstitutionsCentre National de la Recherche Scientifique, National Institute of Advanced Industrial Science and Technology
Citations15

We report the fabrication of p-n+ diamond homojunction through an innovative approach of laser irradiation in liquid-ambient. A shallow phosphorus-doped layer with a high electric conductivity is processed on top of a p-type diamond substrate to form the p-n+ homojunction. The current-voltage measurements at room temperature confirmed high conductivity of the induced n+ layer and showed exceptional rectification properties with an ideality factor of 1.07, excellent low on-resistance of 3.7 Ɨ 10āˆ’2 Ī©cm2, and current density over 260 Acmāˆ’2 at forward-biasing of 10 V. Furthermore, undetectable leakage-current provides a rectification ratio exceeding 1010 at ±6 V, promoting the junction in UV detection applications.