Study on Micro-machining of Nano-crystalline Diamond Films by Femtosecond Laser Ablation
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-08-08 |
| Journal | 2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
| Authors | Yuxiao Cui, Ping Guo, Jiahao Ma |
| Institutions | Tianjin University of Technology and Education |
Abstract
Section titled āAbstractāDue to the nano-dimensional shape, nano-crystalline diamond (NCD) films have exhibited enhanced properties in many application fields, such as electrochemical sensing, micromechanical machines (MEMS), biological cell cultures surface acoustic wave devices, and so on. However, micro-machining of NCD films has always been a problem. In this work, femtosecond laser ablation was applied to achieve the micro-machining of NCD films, which is processed in ambient air using a regenerative amplified Ti: Sapphire femtosecond (fs) laser with pulse duration of 200 fs and central wavelength of 1040 nm. The surface morphology and chemical composition of as-processed NCD films are characterized by scanning electron microscope (SEM) and micro-Raman spectroscopy to evaluate the effectiveness of fs laser ablation.