Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2022-10-23 |
| Authors | Johann Zehetner, G. Vanko, Tibor IzsĆ”k, E. Kovcova, Milan DržĆk |
| Institutions | International Laser Center, Czech Academy of Sciences, Institute of Physics |
Abstract
Section titled āAbstractāThe properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25,50,100,200 and 300 Āµm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.