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6CCVD Research

High electro-mechanical coupling coefficient SAW device with ScAlN on diamond

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2023-01-25
JournalJapanese Journal of Applied Physics
AuthorsKazuki Hatashita, T. Tsuchiya, M. Okazaki, Masayuki Nakano, Sri Ayu Anggraini
InstitutionsKwansei Gakuin University, National Institute of Advanced Industrial Science and Technology
Citations11

Abstract

Section titled ā€œAbstractā€

Abstract In this study, Sc concentration dependence of Sc x Al 1āˆ’ x N/AlN/poly-crystalline diamond/Si surface acoustic wave (SAW) characteristics at high Sc from 23.8% to 44.3% was investigated by fabricating one-port SAW resonator at high frequency. 3.8 GHz one-port resonator fabricated on Sc 0.43 Al 0.57 N showed an excellent performance of electro-mechanical coupling coefficient ( K 2 ) as high as 6.34% for 2nd mode Sezawa wave, which enables a wide bandwidth in high frequency applications. The temperature coefficient of frequency was approximately āˆ’40 to āˆ’50 ppm deg āˆ’1 for the device fabricated with Sc concentration of 42.9%. This is a smaller value compared to conventional high K 2 bulk materials such as LiNbO 3 . As the result, a high K 2 6.34% material system at a higher Sc concentration of ScAlN/AlN/PCD was found to be possible at a high phase velocity of 7000 m s āˆ’1 . Combined with the extremely high-power durability of diamond based device, high-power durable wideband SAW device at high frequency can be expected.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
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