Diamond nucleation in carbon films on Si wafer during microwave plasma enhanced chemical vapor deposition for quantum applications
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-04-17 |
| Journal | Journal of Applied Physics |
| Authors | Vidhya Sagar Jayaseelan, R. N. Singh |
| Institutions | Oklahoma State University |
| Citations | 2 |
Abstract
Section titled āAbstractāNucleation is important in processing of good quality diamond crystals and textured thin films by microwave plasma enhanced chemical vapor deposition (MPECVD) for applications in quantum devices and systems. Bias-enhanced nucleation (BEN) is one approach for diamond nucleation in situ during MPECVD. However, the mechanism of diamond nucleation by BEN is not well understood. This paper describes results on the nucleation of diamond within a carbon film upon application of electric field during the BEN-facilitated MPECVD process. The nature of the diamond film and nuclei formed is characterized by SEM (scanning electron microscopy), Raman spectroscopy, and high-resolution transmission electron microscopy (HRTEM). The HRTEM images and associated diffraction patterns of the nucleation layer show that the diamond nuclei are formed within the carbon film close to the Si (100) substrate surface under the influence of microwaves and electric fields that lead to formation of the textured diamond film and crystal upon further growth. These results are expected to develop diamond films of optimum quality containing a nitrogen-vacancy center for application in quantum systems.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2007 - A review on nucleation, growth, and low-temperature synthesis of diamond thin films [Crossref]
- 2005 - A review of synthesis and properties of cubic boron nitride thin films [Crossref]
- 2018 - A review: Progress in CVD synthesis of layered hexagonal boron nitride with tunable properties and their applications [Crossref]
- 2015 - Novel phase of carbon, ferromagnetism, and conversion into diamond [Crossref]
- 2019 - Tunable charge states of nitrogen-vacancy centers in diamond for ultrafast quantum devices [Crossref]
- 2006 - Processing quantum information in diamond [Crossref]
- 2015 - Experimental loophole-free violation of a Bell inequality using entangled electron spins separated by 1.3 km [Crossref]
- 2016 - Coherent feedback control of a single qubit in diamond [Crossref]
- 2013 - Highly fluorescent nanodiamonds protein-functionalized for cell labeling and targeting [Crossref]
- 2008 - Nanoscale magnetic sensing with an individual electronic spin in diamond [Crossref]