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Research on Micro-Displacement Measurement Accuracy Enhancement Method Based on Ensemble NV Color Center

MetadataDetails
Publication Date2023-04-26
JournalMicromachines
AuthorsYuqi Liu, Zhonghao Li, Hao Zhang, Hao Guo, Ziyang Shi
InstitutionsNorth University of China
Citations1
AnalysisFull AI Review Included

This research validates a method for significantly enhancing the accuracy of micro-displacement measurement using ensemble Nitrogen-Vacancy (NV) color centers in diamond.

  • Core Value Proposition: Achieved high-precision micro-displacement detection by combining Continuous-Wave Optically Detected Magnetic Resonance (CW-ODMR) with a Magnetic Flux Concentrator (MFC).
  • Resolution Achievement: The system demonstrated a displacement detection resolution of 25 nm.
  • Accuracy Enhancement: The integration of the MFC resulted in a 24-fold increase in resolution compared to the system operating without the concentrator.
  • Mechanism of Action: The MFC amplifies the magnetic field gradient change corresponding to the NV spin surface by approximately 24 times, allowing the system to maintain high sensitivity even under weak magnetic field conditions.
  • System Stability: Experimental data confirmed that the MFC structure introduced no observable detrimental influence on the overall signal noise level (noise deviation was calculated at 0.334 mV).
  • Practical Reference: The results provide a robust, practical reference for developing high-precision, room-temperature micro-displacement sensors based on diamond quantum ensembles.
ParameterValueUnitContext
Displacement Resolution (with MFC)25nmSystem performance
Resolution Enhancement Factor24timesCompared to system without MFC
Magnetic Field Gradient Change Rate (with MFC)24timesExperimental comparison
NV Center Concentration3ppmEnsemble diamond sample
NV Sample Dimensions2 x 2 x 0.5mmDiamond size
Excitation Laser Wavelength532nmCW-ODMR setup
Excitation Laser Power300mWCW-ODMR setup
NV Ground State Zero-Field Splitting (D)2.87GHzIntrinsic NV property at zero field
Permanent Magnet MaterialN35-sinteredN/ACylindrical shape
Permanent Magnet Dimensionsr = 5, h = 2mmRadius and thickness
Magnetic Flux Concentrator (MFC) MaterialPermalloyN/AMFC construction
MFC Simulated Magnification~30timesTheoretical amplification
MFC Conical Bottom Diameter/Height15 / 15mmMFC geometry
MFC Cylindrical Top Diameter/Height2 / 15mmMFC geometry
Single Step Displacement (Test)0.05mmMinimum step used for voltage curve
Modulation Frequency1kHzLock-in amplifier setting
System Noise Deviation0.334mVCalculated noise floor
Magnetic Field Gradient (with MFC) Slope-9.89 ± 0.22Gauss/mmdB1/dZ linear fit
Magnetic Field Gradient (without MFC) Slope-0.402 ± 0.009Gauss/mmdB2/dZ linear fit

The experiment utilized a CW-ODMR setup combined with a permanent magnet and a permalloy MFC to measure micro-displacement via changes in the Zeeman splitting frequency.

  1. System Setup and Alignment:

    • A permanent N35-sintered cylindrical magnet was fixed on a horizontal moving displacement table (minimum step accuracy 0.01 mm).
    • The permalloy MFC (conical/cylindrical shape) was aligned coaxially with the permanent magnet axis.
    • The NV ensemble diamond sample (3 ppm) was positioned symmetrically between the two MFC parts.
  2. Optical and Microwave Excitation:

    • A 532 nm laser (300 mW) was directed onto the diamond surface via mirrors, lenses, and a dichroic mirror.
    • A microwave source (N5183B) emitted a resonant signal via an antenna to promote electron spin reversal, generating a modulated fluorescence signal.
  3. Displacement and Gradient Control:

    • Micro-displacement was controlled by adjusting the horizontal position of the permanent magnet relative to the fixed diamond/MFC assembly.
    • The magnetic field step was changed by adjusting the horizontal displacement to realize the magnetic field gradient induced by the spin system.
  4. Signal Detection and Demodulation:

    • Fluorescence was collected by a photodetector (APD130A2/M).
    • The collected signal was input into a lock-in amplifier (modulation frequency 1 kHz, amplitude 1 V) for demodulation, yielding the first-order differential signal.
    • The demodulated signal was monitored via an oscilloscope.
  5. Comparative Analysis:

    • The relationship between the Zeeman splitting frequency change (∆ω) and displacement (Z) was measured both with and without the MFC.
    • The slope of the frequency-displacement curve (d∆ω/dZ) was calculated for both configurations (e.g., -23.4 MHz/mm with MFC vs. -0.91 MHz/mm without MFC).
    • System resolution was determined by dividing the calculated system noise deviation (0.334 mV) by the system sensitivity (voltage amplitude change per displacement step).

The enhanced NV-based micro-displacement technology is highly relevant for industries requiring non-contact, high-resolution metrology and quantum sensing capabilities at room temperature.

  • Precision Manufacturing and Metrology:
    • Calibration and control of ultra-fine positioning stages (e.g., in semiconductor lithography or wafer inspection).
    • Non-contact displacement sensing for high-speed, high-accuracy feedback loops in industrial automation.
  • Quantum Sensing and Magnetometry:
    • Development of compact, highly sensitive vector magnetometers capable of operating in ambient conditions.
    • Applications in magnetic imaging and gradient sensing where high spatial resolution is critical.
  • Materials Science and Testing:
    • Measurement of micro-strain, creep, and vibration in micro-mechanical structures (MEMS) with nanometer precision, overcoming limitations associated with piezoelectric ceramics (hysteresis, nonlinearity).
  • Scientific Instrumentation:
    • Integration into advanced research instruments requiring precise control and measurement of relative motion between components (e.g., scanning probe microscopy, quantum optics setups).
View Original Abstract

This paper builds a corresponding micro-displacement test system based on an ensemble nitrogen-vacancy (NV) color center magnetometer by combining the correlation between a magnetic flux concentrator, a permanent magnet, and micro-displacement. By comparing the measurement results obtained with and without the magnetic flux concentrator, it can be seen that the resolution of the system under the magnetic flux concentrator can reach 25 nm, which is 24 times higher than without the magnetic flux concentrator. The effectiveness of the method is proven. The above results provide a practical reference for high-precision micro-displacement detection based on the diamond ensemble.

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