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6CCVD Research

Contribution of Ribbon-Structured SiO2 Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2023-07-10
JournalSensors
AuthorsMohammed Moutaouekkil, JƩrƩmy Streque, Othmane Marbouh, El Houssaine El Boudouti, Omar Elmazria
InstitutionsMohamed I University, Centre National de la Recherche Scientifique
Citations1
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New designs based on S0 Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO2, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO2 cap layer, or structured SiO2 elements, showing their performance in the usual terms of electromechanical coupling coefficient (K2), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO2 capping. The addition of a thin diamond layer can also improve the velocity and electromechanical coupling coefficient, while keeping zero TCF and increasing the solidity of the membranes. Beyond the increase in performance allowed by such resonator configurations, their inherent structure shows additional benefits in terms of passivation, which makes them particularly relevant for sensing applications in stern environments.

Tech Support

Section titled ā€œTech Supportā€

Original Source

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References

Section titled ā€œReferencesā€
  1. 2022 - c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices [Crossref]
  2. 2002 - Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures [Crossref]
  3. 2006 - 5GHz SAW devices based on AlN/diamond layered structure realized using e-beam lithography [Crossref]
  4. 2009 - AlN/ZnO/diamond structure combining isolated and surface acoustic waves [Crossref]

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