A new x-ray source technology for demanding SMT and Semiconductor inspection (IMPACT 23, S20-3)
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-10-25 |
| Authors | Keith Bryant |
Abstract
Section titled āAbstractāThis source is based on advanced electron optics and the latest very thin tungsten- diamond transmission target technology. Automatic e-beam focusing, and astigmatism correction ensures that the smallest possible, truly round focal spot is achieved. The NanoTube also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling, and cutting-edge thermal design results in extreme stability over time. This enables an unprecedented true resolution of 150nm lines and spaces. The true round spot of the tube is demonstrated by the highly symmetric images of a āSiemens starā resolution target, the innermost features are 150 nm. The NanoTube is the focus of this paper and work is currently on going, Excillum have already purchased a leading high-end manufacturers off-line system which has become our āreal lifeā test bed, so far, we have benchmarked the source and have upgraded it to the highest current industry specification. We have now replaced the source with the recently developed Excillum NanoTube, running at higher power, offering all the advantages listed, plus further improved electron optics, reliability, and redesigned exterior for easier installation into existing cabinets. The paper will contain comparison data and images from the current industry best vs. the latest Nano Focus tube, plus data from reliability and stability tests using a real-life system and not test rigs. Key words; x-ray, electronics inspection, Lab6, Nano tube, FOD, radiation damage, flux density, open transmissive.