A wide ultraviolet spectra response photodetector based on epitaxial growth of highly-oriented ε-Ga 2 O 3 crystal on diamond substrate
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2023-10-02 |
| Journal | Functional Diamond |
| Authors | Qilong Yuan, Wei Wang, Wenrui Zhang, Mengting Qiu, Mingyang Yang |
| Institutions | University of Chinese Academy of Sciences, Hefei National Center for Physical Sciences at Nanoscale |
| Citations | 11 |
Abstract
Section titled “Abstract”In recent years, diamond has shown great potential in solar-blind ultraviolet (UV) photodetection due to its ultrawide bandgap (∼ 5.5 eV) and other superior semiconductor properties. However, the response region of diamond photodetector is usually smaller than 230 nm, which cannot cover the whole solar-blind region from 200 to 280 nm. In this work, an ε-Ga2O3/diamond photodetector with wide spectra responsivity from 210 (or even lower) to 260 nm was fabricated. High-quality ε-Ga2O3 film with columnar crystal was epitaxially grown on single crystalline CVD diamond substrate by pulse laser deposition (PLD). TEM characterization revealed that the ε-Ga2O3 film grew along the <001> orientation on diamond (100) substrate. The deep ultraviolet (DUV) photodetector based on the ε-Ga2O3/diamond structure showed a high light-to-dark ratio over 5.7 × 104 and good linear response to the incident light power density from 10 to 400 mW/cm2. Moreover, compared to other photodetectors, the fabricated ε-Ga2O3/diamond photodetector achieved high responsivity and wide spectra response region from 210 to 260 nm, with high solar-blind rejection ratio of 104 (R240/R280) and 165 (R210/R280), respectively. The extension of spectra region with high responsivity of the ε-Ga2O3/diamond photodetector can be attributed to the thin thickness of ε-Ga2O3 film (around 200 nm) and parts of the DUV light were absorbed by diamond. The high responsivity and wide spectra response region indicate the fabricated ε-Ga2O3/diamond photodetector can be used for the detection of ultraviolet in the most of the DUV region.
Tech Support
Section titled “Tech Support”Original Source
Section titled “Original Source”References
Section titled “References”- 2019 - Recent progress in solar-blind deep-ultraviolet photodetectors based on inorganic ultrawide bandgap semiconductors