Fabrication of Nitrogen Vacancy Center‐Doped Free‐Standing Diamond Photonic Devices via Faraday Cage‐Angled Etching
At a Glance
Section titled “At a Glance”| Metadata | Details |
|---|---|
| Publication Date | 2023-10-13 |
| Journal | physica status solidi (a) |
| Authors | Christian Giese, Patricia Quellmalz, Peter Knittel, Tingpeng Luo, Niklas Mathes |
| Institutions | Fraunhofer Institute for Applied Solid State Physics |
| Citations | 3 |
Abstract
Section titled “Abstract”Herein, methods for the fabrication of monolithic diamond integrated photonic devices via Faraday cage‐angled etching of functional epitaxial diamond layers are presented. Optimal waveguide width is determined via simulation and the fabrication of nitrogen vacancy (NV) center‐doped microring resonators is demonstrated. The performance of the devices is verified via microphotoluminescence as well as cathodoluminescence scans of the in‐grown NV centers, revealing clearly visible cavity lines. The scalable fabrication method allows for the realization of large numbers of lateral waveguide structures as needed for future applications in integrated quantum sensing devices as well as novel spin‐based quantum computers.
Tech Support
Section titled “Tech Support”Original Source
Section titled “Original Source”References
Section titled “References”- 2013 - Optical Engineering of Diamond