Tomography of Electrical Data in Advanced-Node SRAMs
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-11-08 |
| Journal | Proceedings - International Symposium for Testing and Failure Analysis |
| Authors | G. Johnson, F. Hitzel |
| Institutions | Carl Zeiss (Australia) |
Abstract
Section titled āAbstractāAbstract A commercially available 6T SRAM was examined with an AFM-in-SEM system. A conductive AFM measurement was taken using an AC bias on the backside of the sample with a linear amplifier on the data. Then using a cone-shaped, diamond AFM tip, subsequent scans were made over the field of view at increasingly higher downforce until areas of the chip were worn away. The results provide a survey of implants and structure milling from contact level through the wells of the device. An additional experiment was performed with EBAC.