Diamond-like films of tetrahedral amorphous carbon deposited by anodic arc evaporation of graphite
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2023-12-15 |
| Journal | Surface and Coatings Technology |
| Authors | Bert Scheffel, O. Zywitzki, T. Kopte |
| Institutions | Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology |
| Citations | 6 |
Abstract
Section titled āAbstractāA physical vapor deposition process using anodic arc evaporation in combination with a hollow cathode arc discharge was applied to the evaporation of graphite for deposition of hydrogen-free carbon layers. The diamond-like carbon (DLC) films deposited on 100Cr6 steel substrates were investigated by nanoindentation, Raman spectrometry, FE-SEM, AFM and spectroscopic ellipsometry. The relationships between the process parameters and the coating properties are discussed. Coatings deposited without bias voltage at substrate temperatures <200 Ā°C are very hard (61-75 GPa) with also very high Youngās modulus (588-685 GPa). The evaluation of the Raman spectra indicated a high proportion of tetrahedral sp3 bonds in the range of 70-88 %. Obviously, the vapor particle energies are high enough to achieve such high hardness values even without application of a bias voltage. The coatings proved to be completely droplet-free and have a very low surface roughness as confirmed by FE-SEM and AFM. The deposition rates in the range of 4-18 nm/s are exceptionally high for such tetrahedral amorphous carbon (ta-C) coatings, which is a good prerequisite for industrial applications. The ta-C layers with very high hardness and smooth surface are well suited as wear resistant layers.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
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