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Energy Spectroscopy for Low-energy Photons Using Diamond Detector Combined with Micro-CMOS Preamplifier

MetadataDetails
Publication Date2024-01-25
JournalSensors and Materials
AuthorsKengo Oda, Junichi H. Kaneko, Daisuke Matsunaga, Takanori Hanada, Tsukasa Mizukoshi
InstitutionsHoriba (Japan), Hokkaido University
AnalysisFull AI Review Included

This study successfully demonstrated high-resolution soft X-ray energy spectroscopy using a single-crystal CVD diamond detector operating at room temperature, leveraging diamond’s ultra-low leakage current and excellent carrier transport properties.

  • Core Achievement: Achieved an energy resolution of (484 ± 10) eV (FWHM) for 5.9 keV X-rays (55Fe source) at room temperature, a significant step toward achieving performance comparable to cooled silicon drift detectors.
  • Detector Design: A 300 µm thick electronics-grade CVD diamond was coupled to a micro-CMOS charge-sensitive preamplifier featuring an extremely low feedback capacitance of 13 fF.
  • Noise Reduction: High signal-to-noise ratio was achieved by minimizing total input capacitance (CT) and utilizing the diamond’s inherent low leakage current (measured at approximately 1 pA at -120 V).
  • Energy Range and Linearity: The detector successfully measured photons across a wide range (5.9 keV to 59.5 keV), exhibiting high energy linearity with a decision count of R2 = 0.9993.
  • Limitation Identified: Incomplete charge collection was observed due to the small Φ97 µm readout electrode, which limits the high electric field intensity to a small region near the contact.
  • Future Direction: Development will focus on implementing a multi-channel readout method using multiple microelectrodes to ensure uniform charge collection across the entire crystal volume.
ParameterValueUnitContext
Detector MaterialSingle-crystal CVD DiamondN/AElectronics-grade (Element Six)
Detector Dimensions3 × 3 × 300mmThickness: 300 µm
Readout Electrode DiameterΦ97µmTi/Au contact
Preamplifier Footprint0.5 × 0.5mm2CMOS technology (HORIBA Ltd.)
Preamplifier Feedback Capacitance13fFDesigned for minute signal amplification
Optimal Shaping Time (τs)0.5µsValue providing highest energy resolution
Operating Temperature~25°CRoom temperature
Optimal Bias Voltage (5.9 keV)-230VUsed for best resolution
Leakage Current (Ileak)~1pAAt -120 V bias, 25 °C
Energy Resolution (5.9 keV X-ray)(484 ± 10)eV (FWHM)Measured using 55Fe source at -230 V
Energy Resolution (59.5 keV γ-ray)3.8 ± 0.1keV (FWHM)Measured using 241Am source at -300 V
Energy Linearity (R2)0.9993N/ABetween 5.9 keV and 59.5 keV
Average E-H Pairing Energy (Diamond)13.1eVComparison: Si is 3.62 eV
Detector Capacitance (Calculated)120fFClose to the allowable limit of the preamplifier
Charge Carrier μτ Product (Diamond)10-3cm2/VLimits lateral charge collection
Preamplifier Rise Time (10-90%)20nsFor 5.9 keV X-rays

The detector fabrication and measurement setup were optimized to minimize noise and maximize charge collection efficiency for soft X-ray spectroscopy at room temperature.

  1. Diamond Preparation: Electronics-grade single-crystal CVD diamond (3 mm × 3 mm × 300 µm) was chemically cleaned and oxygen-terminated using hot mixed acid, dichromic acid, and hot aqua regia to ensure high surface insulation.
  2. Electrode Deposition:
    • A large Al electrode (3 mm, 100 nm thick) was deposited on the incident surface by thermal evaporation.
    • A small Ti/Au micro-electrode (Φ97 µm, 100 nm thick) was deposited on the readout side using photolithography.
  3. Preamplifier Integration: A micro-CMOS charge-sensitive preamplifier (13 fF feedback capacitance) was placed near the detector and connected directly to the Ti/Au readout electrode using gold wire ultrasonic bonding to minimize parasitic capacitance (CP).
  4. I-V Characterization: Leakage current was measured at room temperature (25 °C) under high vacuum, confirming a low value of approximately 1 pA at -120 V.
  5. Spectroscopy Setup: The detector was placed in an Al housing for electromagnetic shielding.
    • Bias voltage (0 to -300 V) was applied to the incident Al electrode.
    • Signals were processed using an ORTEC 672 shaping amplifier set to an optimal shaping time of 0.5 µs.
    • Energy spectra were recorded using a multichannel analyzer (MCA).
  6. Simulation: A 2D electric field intensity simulation was performed using the finite element method (Elmer solver) to analyze charge collection dynamics within the 300 µm thick diamond structure.

The development of a room-temperature, high-resolution diamond soft X-ray spectrometer addresses critical needs in fields where cooling mechanisms are impractical or restricted.

  • X-ray Fluorescence (XRF) Analysis: Applicable in X-ray fluorescence analyzers, particularly for microscopes or portable devices that require soft X-ray energy spectra measurement in confined spaces without the need for Peltier cooling.
  • Accelerators and Nuclear Fusion: Diamond’s high radiation resistance and high-temperature operation capability make it suitable for monitoring and diagnostics in harsh environments like nuclear reactors and fusion experiments.
  • Medical and Biological Imaging: Near bioequivalence and fast response times support applications in medical diagnostics and radiation dosimetry.
  • General Radiation Detection: Use as a robust, high-performance radiation detector for alpha particles, neutrons, and heavy charged particles, expanding beyond traditional silicon limitations.
  • Space Applications: The ability to operate reliably at room temperature and its inherent radiation hardness make it ideal for space-based X-ray detection systems where cooling is complex and power is limited.
View Original Abstract

To measure soft X-ray energy spectra at room temperature using diamond, we connected a 300-μm-thick single-crystal CVD diamond radiation detector with excellent charge carrier transport properties to a micro-preamplifier fabricated using CMOS technology via Φ97 μm electrodes.We attempted to measure the photon energy spectrum from a few keV to 60 keV at room temperature by reducing the leakage current and the total input capacitance to the preamplifier.The energy resolution for 5.9 keV X-rays from 55 Fe was ΔE = (484 ± 10) eV (FWHM).