Controllable preparation of surface nanostructures on boron doped diamond by plasma etching
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2024-08-01 |
| Journal | Journal of Physics Conference Series |
| Authors | Xingyu Li, Guanjie Ma, Yuhao Long, Jiangtao Huang, Zongyan Zhang |
Abstract
Section titled āAbstractāAbstract Due to the high hardness and chemical inertness of diamond, it is difficult to fabricate diamond nanostructures, especially with a high aspect ratio. Plasma etching is an attractive technology for processing diamonds due to its high anisotropic nature and fine controllability, which is of great significance to diamond machining and diamond device fabrication. In this paper, we fabricated large area and high aspect ratio diamond nanoneedle arrays on boron-doped diamond (BDD) by using a maskless inductively coupled plasma (ICP) etching process. The ICP etching was performed in hydrogen (H) and hydrogen/argon (H/Ar) plasma. Then, the influences of duration and pressure on the morphology of diamond nanostructures were studied, and the mechanism of formation of nanoneedle arrays was discussed. The research results show that ICP etching is a simple and efficient method for fabricating diamond nanostructures, which provides a promising way for the industrial fabrication of large-scale BDD nanostructures.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2018 - Thin film diamond membranes bonded on-demand with SOI ring resonators [Crossref]
- 2024 - Calculation of coupling coefficients for diamond micro-ring resonators [Crossref]
- 2022 - Abnormally high thermal conductivity in fivefold twinned diamond nanowires [Crossref]
- 2021 - Ultrananocrystalline Diamond Nanowires: Fabrication, Characterization, and Sensor Applications [Crossref]
- 2019 - Nanoplasmonic 1D diamond UV photodetectors with high performance [Crossref]
- 2020 - Precise ultrananocrystalline diamond nanowire arrays for high performance gas sensing application [Crossref]
- 2019 - Effect of metal ions on hybrid graphite-diamond nanowire growth: Conductivity measurements from a single nanowire device [Crossref]
- 2020 - Sareh P. Restructuring and breakup of nanowires with the diamond cubic crystal structure into nanoparticles [Crossref]
- 2022 - Constructing Tanghulu-like Diamond@ Silicon carbide nanowires for enhanced thermal conductivity of polymer composite [Crossref]
- 2020 - Geometric confinement governs toughness and strength in defective diamond nanowires [Crossref]