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6CCVD Research

Generation of GHz surface acoustic waves in (Sc,Al)N thin films grown on free-standing polycrystalline diamond wafers by plasma-assisted molecular beam epitaxy

At a Glance

Section titled ā€œAt a Glanceā€
MetadataDetails
Publication Date2024-09-03
JournalJournal of Physics D Applied Physics
AuthorsMingyun Yuan, Duc V. Dinh, Soumen Mandal, Oliver A. Williams, Zhuohui Chen
Citations3

Abstract

Section titled ā€œAbstractā€

Abstract Telecommunication of the next generation demands filters that can operate in the 10 GHz range with sufficient bandwidths. For surface-acoustic-wave (SAW) devices this prerequisite translates into high sound velocities and high piezoelectric couplings. Wurtzite AlN on diamond, which exploits the strong piezoelectricity of AlN with the very high SAW velocity of diamond, has been considered a promising platform. A significant boost (up to a factor of 4) of the piezoelectric response can be obtained by alloying AlN with Sc. Here, the main challenge lies in the synthesis of highly-oriented thin (Sc,Al)N films on diamond. In this work, we aim at establishing a platform for SAW devices using plasma-assisted molecular beam epitaxy for the deposition of Sc 0.2 Al 0.8 N on diamond. We investigate the structural properties related to SAW generation gearing towards applications at high frequencies. To this end, we prepare (Sc,Al)N thin films on polished polycrystalline diamond wafers and demonstrate the efficient generation of SAW modes with frequencies up to 8 GHz. Systematic studies of the dependence of the SAW velocity and electromechanical coupling coefficient on the Sc 0.2 Al 0.8 N film thickness is presented for various SAW modes. Our result demonstrates the potential of this material combination for future application that requires large bandwidth in the ultra-high frequency range.

Tech Support

Section titled ā€œTech Supportā€

Original Source

Section titled ā€œOriginal Sourceā€

References

Section titled ā€œReferencesā€
  1. 2002 - Superhigh frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates [Crossref]
  2. 2009 - Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films [Crossref]
  3. 2014 - High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient [Crossref]
  4. 2019 - Single crystalline ScAlN surface acoustic wave resonators with large figure of merit (Q Ɨ k) [Crossref]
  5. 2020 - Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N (112ĀÆ) thin films [Crossref]
  6. 1972 - Elastic moduli of diamond as a function of pressure and temperature [Crossref]
  7. 1998 - Sound velocity of AlxGa 1āˆ’xN thin films obtained by surface acoustic-wave measurements [Crossref]
  8. 2016 - Coupling a surface acoustic wave to an electron spin in diamond via a dark state [Crossref]
  9. 2002 - Low loss diamond SAW devices by small grain size poly-crystalline diamond [Crossref]
  10. 2005 - Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices [Crossref]

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