High Order Rayleigh-Type SAW Devices for Advanced 5G Front-ends with Improved Performance
At a Glance
Section titled āAt a Glanceā| Metadata | Details |
|---|---|
| Publication Date | 2024-09-01 |
| Journal | Journal of Physics Conference Series |
| Authors | Luyao Liu, Qiaozhen Zhang, Hao Sun, Yang Yang, Xiangyong Zhao |
Abstract
Section titled āAbstractāAbstract This paper presents a piezoelectric layered structure composed of a rotated LiNbO 3 thin film combined with a diamond film for improved comprehensive performance SAW devices. Theoretical analysis of SAW resonator on the proposed structure is performed to calculate its SAW characteristics including electromechanical coupling coefficient ( K 2 ), frequency ( f ), and quality factor ( Q ). It is found that a high-order Rayleigh mode is effectively excited and exhibits not only high frequency but also large K 2 and high Q . The influences of the Euler angles, layer stack configurations of LiNbO 3 , and the electrode on the SAW properties are investigated systematically to optimize the device performance of the proposed structure. The results show the resonator can operate at frequency of 6.6 GHz with a large K 2 of 13.58% and high Q of 2134, which makes the proposed layered structure a good potential solution for high-performance wideband SAW filters operating over 5 GHz.
Tech Support
Section titled āTech SupportāOriginal Source
Section titled āOriginal SourceāReferences
Section titled āReferencesā- 2022 - Development and Application of SAW Filter [Crossref]
- 2021 - Surface Acoustic Wave Resonators With Hetero Acoustic Layer (HAL) Structure Using Lithium Tantalate and Quartz [Crossref]
- 2005 - ZnO/AlN/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient [Crossref]
- 2020 - FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices [Crossref]
- 2012 - High-frequency SAW filters based on diamond films [Crossref]
- 2008 - SAW devices based on ZnO inclined c-axis on diamond [Crossref]
- 2021 - Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications [Crossref]
- 2023 - Record-Breaking Frequency of 44 GHz Based on the Higher Order Mode of Surface Acoustic Waves with LiNbO3/SiO2/SiC Heterostructures [Crossref]
- 2017 - Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO3 thin plate and quartz substrate