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High Order Rayleigh-Type SAW Devices for Advanced 5G Front-ends with Improved Performance

MetadataDetails
Publication Date2024-09-01
JournalJournal of Physics Conference Series
AuthorsLuyao Liu, Qiaozhen Zhang, Hao Sun, Yang Yang, Xiangyong Zhao

Abstract This paper presents a piezoelectric layered structure composed of a rotated LiNbO 3 thin film combined with a diamond film for improved comprehensive performance SAW devices. Theoretical analysis of SAW resonator on the proposed structure is performed to calculate its SAW characteristics including electromechanical coupling coefficient ( K 2 ), frequency ( f ), and quality factor ( Q ). It is found that a high-order Rayleigh mode is effectively excited and exhibits not only high frequency but also large K 2 and high Q . The influences of the Euler angles, layer stack configurations of LiNbO 3 , and the electrode on the SAW properties are investigated systematically to optimize the device performance of the proposed structure. The results show the resonator can operate at frequency of 6.6 GHz with a large K 2 of 13.58% and high Q of 2134, which makes the proposed layered structure a good potential solution for high-performance wideband SAW filters operating over 5 GHz.

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