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Electrical Characterization of Metal Contacts to Carbon Nanostructured Materials

MetadataDetails
Publication Date2024-11-22
JournalECS Meeting Abstracts
AuthorsZewen Sun, Minsu Cho, A. Nahar, Kamatchi Jothiramalingam Sankaran, Yoshimine Kato

Among many types of nanostructured carbon materials, carbon nanowalls (CNWs) are the unique continuous structure of multi-layer graphene, which stands on a substrate surface almost vertically. Due to the high aspect ratio, high in-plane continuity, and large surface area, there are a variety of potential applications such as electron field emitters, electrodes of lithium-ion batteries, and gas sensors. In these applications, possible electrical resistance between metal electrodes and CNWs affects the resulting device performance. However, electrical contact behavior between metal electrodes and CNWs has not been reported. In this study, the effect of several metal species on contacts to nitrogen-incorporated CNWs is examined at temperatures from room temperature to 300 ºC. Nitrogen-incorporated CNWs were deposited on quartz substrates by microwave plasma-enhanced CVD and followed by deposition of an array of electrodes of several metal species by sputtering or vacuum evaporation. The total resistance between pairs of electrodes were measured at temperatures between room temperature and 300 °C in a vacuum. The current-voltage characteristics for pairs of electrodes showed that all kinds of electrode materials produced straight lines, typical of Ohmic contacts, at low applied voltages. The contact resistance derived from the linear relation between the total resistance and the distance between electrodes decreased gently with increasing temperature, indicating low conduction barriers [1]. Consequently, the measured contact resistance could account for a large portion of the total resistance. The measured result for nanocrystalline diamond will also be reported. [1] Z. Sun, M. Cho, L. Huang, R. Hijiya, Y. Kato, K. Teii, ECS J. Solid State Sci. Technol. 11, 61012 (2022).